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发明名称
MIST REMOVING APPARATUS OF SEMICONDUCTOR WAFER
摘要
申请公布号
KR960002392(Y1)
申请公布日期
1996.03.21
申请号
KR19920027805U
申请日期
1992.12.30
申请人
HYUNDAI ELECTRONICS IND. CO., LTD.
发明人
KWON, WON - TAEK;LEE, KEUN - HO;LEE, DOO - HEE;KOO, YOUNG - MO;BAEK, DONG - WON
分类号
H01L21/31;H01L21/312;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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