| 发明名称 |
MANUFACTURING METHOD OF YBA2 CU3O7-x (X=0-0.5) SUPER CONDUCTOR |
| 摘要 |
The method consists of the steps of; melting evaporants such as Y(thd), Ba(thd), Cu(thd) by letting the temperature between a substrate and a nozel be distributed highest; increasing the thermal activity of the evaporants by using a substrate heater; and fabricating YBaCuO thin film.
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| 申请公布号 |
KR950008862(B1) |
申请公布日期 |
1995.08.08 |
| 申请号 |
KR19920005522 |
申请日期 |
1992.04.02 |
| 申请人 |
KOREA ATOMIC POWER RESEARCH INSTITUTE |
发明人 |
LEE, HUI - GYUN;PARK, SUN - DONG;JANG, IN - SUN;WON, DONG - YON |
| 分类号 |
H01L39/00;(IPC1-7):H01L39/00 |
主分类号 |
H01L39/00 |
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