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发明名称
SPUTTERING TARGET
摘要
申请公布号
JPH0790576(A)
申请公布日期
1995.04.04
申请号
JP19930239496
申请日期
1993.09.27
申请人
VACUUM METALLURGICAL CO LTD;SONY CORP
发明人
NOZAWA YOSHIHARU;SUGIYAMA TSUGUNOBU;HASHIMOTO YOSHIHIRO
分类号
C23C14/35;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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