发明名称 Transfer apparatus
摘要 There is provided a transfer apparatus which is capable of transferring objects on a plurality of carriers at a time to a desired point. This apparatus comprises a carrier table for linearly arranging a plurality of the carriers, a plurality of push-up members for pushing up the objects supported on the carriers, drive devices for moving the push-up members towards or away from each other, and a rotary transfer arm mechanism having a pair of support arms for receiving the objects lifted on the push-up members, and transferring the objects to a desired point.
申请公布号 US5374153(A) 申请公布日期 1994.12.20
申请号 US19930140985 申请日期 1993.10.25
申请人 TOKYO ELECTRON LIMITED;TOKYO ELECTRON KYUSHU LIMITED 发明人 NISHI, MITSUO
分类号 B08B11/02;H01L21/304;H01L21/64;H01L21/677;H01L21/68;(IPC1-7):B65G65/00 主分类号 B08B11/02
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