发明名称 |
METHOD OF PRODUCING A METAL FILM |
摘要 |
The invention concerns a method of producing a film of metal (2M) which covers the whole or parts of a substrate (1) made of an organic or inorganic material. The metal film (2M) is produced from a chemical compound containing a metal. The compound is first evaporated, then condensed on to the surface of the substrate (1) and decomposed by irradiation with UV radiation to give a metal film (2M). In order to ensure high homogeneity within the metal film (2M) and to form a sharp edge, the substrate (1) is cooled to a cryogenic temperature during the condensation and irradiation of the chemical compound. |
申请公布号 |
WO9413854(A1) |
申请公布日期 |
1994.06.23 |
申请号 |
WO1993EP02748 |
申请日期 |
1993.10.07 |
申请人 |
HERAEUS NOBLELIGHT GMBH;ESROM, HILMAR;REISS, HARALD |
发明人 |
ESROM, HILMAR;REISS, HARALD |
分类号 |
C23C14/24;C23C18/14;H05K3/10;(IPC1-7):C23C18/14;C23C16/48 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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