发明名称 METHOD OF PRODUCING A METAL FILM
摘要 The invention concerns a method of producing a film of metal (2M) which covers the whole or parts of a substrate (1) made of an organic or inorganic material. The metal film (2M) is produced from a chemical compound containing a metal. The compound is first evaporated, then condensed on to the surface of the substrate (1) and decomposed by irradiation with UV radiation to give a metal film (2M). In order to ensure high homogeneity within the metal film (2M) and to form a sharp edge, the substrate (1) is cooled to a cryogenic temperature during the condensation and irradiation of the chemical compound.
申请公布号 WO9413854(A1) 申请公布日期 1994.06.23
申请号 WO1993EP02748 申请日期 1993.10.07
申请人 HERAEUS NOBLELIGHT GMBH;ESROM, HILMAR;REISS, HARALD 发明人 ESROM, HILMAR;REISS, HARALD
分类号 C23C14/24;C23C18/14;H05K3/10;(IPC1-7):C23C18/14;C23C16/48 主分类号 C23C14/24
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