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经营范围
发明名称
PLASMA TREATMENT DEVICE
摘要
申请公布号
JPH06104096(A)
申请公布日期
1994.04.15
申请号
JP19920249576
申请日期
1992.09.18
申请人
HITACHI LTD
发明人
KAJI TETSUNORI;WATANABE KATSUYA;WATANABE SEIICHI
分类号
C23F4/00;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/46
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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