| 摘要 |
PURPOSE:To provide an aluminum nitride sintered compact excellent in heat conductivity and insulating property and low thermal expansion coefficient free from a layer different from the other part and having uniform characteristics. CONSTITUTION:When an aluminum nitride sintered compact is produced by sintering, operation for destroying the equilibrium state of a reaction on the surface of a compact to be sintered is carried out during sintering so as to prevent the stop of progress of sintering due to an apparent equilibrium state attained by the confrontation between the partial pressure of gaseous N2 in the sintering atmosphere and that of gaseous CO generated by reduction. Since the reaction can be allowed to proceed further, the compact to be sintered reacts sufficiently and difference in characteristics between the interior and surface part of the compact is not produced. |
