发明名称 SEMICONDUCTOR STORAGE DEVICE
摘要 PURPOSE:To realize an increase of capacitance of a capacitor by laminating a memory capacitor of a memory cell and a storage capacitor of an adjacent memory cell. CONSTITUTION:An n<+> diffusion layer-polysilicon electrode contact 7 is shaped on a memory cell n<+> diffusion layer 5 of a digit line 1. A polysilicon electrode 13 is formed thereon across a memory cell of an adjacent digit line 2. A capacitor insulating film 11 is formed on the polysilicon electrode 13 and a capacitor polysilicon 10 is formed thereon. Another capacitor insulating film 11 is formed on the capacitor polysilicon 10. An n<+> diffusion layer-polysilicon electrode contact 8 is shaped, a polysilicon electrode 12 is formed and a storage capacitor is constituted. As a result, a capacitor can be constituted of the polysilicon electrode 13 and the capacitor polysilicon 10, and the polysilicon electrode 12 and the capacitor polysilicon 10.
申请公布号 JPH05283644(A) 申请公布日期 1993.10.29
申请号 JP19920110683 申请日期 1992.04.03
申请人 发明人
分类号 H01L27/04;H01L21/822;H01L21/8242;H01L27/10;H01L27/108 主分类号 H01L27/04
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