ELECTRO-HYDROMECHANICAL ION SOURCE, FLUORIC ION EMITTING METHOD USING IT, SECONDARY ION MASS-SPECTROGRAPHIC DEVICE AND METHOD USING IT, AND TREATING DEVICE AND METHOD USING IT,申请号JP19920011870-传众专利搜索

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发明名称	ELECTRO-HYDROMECHANICAL ION SOURCE, FLUORIC ION EMITTING METHOD USING IT, SECONDARY ION MASS-SPECTROGRAPHIC DEVICE AND METHOD USING IT, AND TREATING DEVICE AND METHOD USING IT
摘要
申请公布号	JPH05205680(A)	申请公布日期	1993.08.13
申请号	JP19920011870	申请日期	1992.01.27
申请人	HITACHI LTD	发明人	UMEMURA KAORU;KAWANAMI YOSHIMI;SHICHI HIROYASU
分类号	H01J37/08;H01J49/30	主分类号	H01J37/08
代理机构		代理人
主权项
地址

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