PHOTORESIST COMPOSITION COMPRISING A NON-AROMATIC RESIN HAVING NO AROMATIC STRUCTURES DERIVED FROM UNITS OF AN ALIPHATIC CYCLIC HYDROCARBON AND UNITS OF MALEIC ANHYDRIDE AND/OR MALEIMIDE AND A PHOTOSENSITIVE AGENT

摘要

PCT No. PCT/JP89/00159 Sec. 371 Date Oct. 17, 1989 Sec. 102(e) Date Oct. 17, 1989 PCT Filed Feb. 17, 1989.A photoresist composition comprising: a resin soluble in an aqueous alkaline solution, having units of an aliphatic cyclic hydrocarbon main frame and units derived from maleic anhydride and/or units derived from a maleimide; and a photosensitive agent in a sufficient amount to promote or hinder the solubility of said resin in an aqueous alkaline solution upon exposure to active radiation so as to create a substantial difference in the solubility as between an exposed portion and a non-exposed portion and to form a positive or negative image by subsequent development with an aqueous alkaline solution.