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发明名称
CRYSTAL-ETCHED MATCHING FACES ON SEMICONDUCTOR CHIP AND SUPPORTING SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
US5153700(A)
申请公布日期
1992.10.06
申请号
US19910643585
申请日期
1991.01.22
申请人
NIPPONDENSO CO., LTD.;NIPPON SOKEN INC.
发明人
OHARA, FUMIO;KAWAI, TOSHIYUKI;SAKAKIBARA, NOBUYOSHI;HUZINO, SEIZI;HATTORI, TADASHI;KAWAMOTO, KAZUNORI
分类号
H01L21/60;H01L23/13;H01L23/538;H01L29/06
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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