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发明名称
INSULATING FILM
摘要
申请公布号
JPH04184931(A)
申请公布日期
1992.07.01
申请号
JP19900315331
申请日期
1990.11.20
申请人
NEC CORP
发明人
KUBOTA HIROSHI
分类号
H01L21/316;H01L21/822;H01L21/8242;H01L27/04;H01L27/108
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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