| 摘要 |
PURPOSE:To prevent spreading of a film-forming particle into a shadow part of a wire mask by providing a wire mask on a surface of a substrate where a thin film is formed, setting up a baffle plate at its both sides, and by regulating incidence angle of the film-forming particle to a certain angle or less. CONSTITUTION:In this invention, a baffle plate 54 is set up while it is separated from a surface 3 at both sides along a wire mask 16 which is set up on the thin-film forming surface 3 and incidence angle theta1 of the film-forming particle for a direction of a normal 70 of the surface 3 is regulated to a certain angle or less by the baffle plate 54, thus preventing spreading of the film-forming particle to a shadow part of the wire mask even if the wire mask is not adhered onto a surface where the thin film is formed, disabling prevention of film formation at the shadow part of the baffle plate, obtaining a patterning thin film which is completely separated one another easily and stably, and achieving formation of the thin film and patterning simultaneously. |
