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发明名称
A WAFER CENTERING ASSEMBLY
摘要
申请公布号
EP0437018(A3)
申请公布日期
1991.12.11
申请号
EP19900309002
申请日期
1990.08.16
申请人
SILICON TECHNOLOGY CORPORATION
发明人
STEERE, ROBERT E., III;LEONARD, THOMAS E.
分类号
B23Q3/18;B24B9/00;B24B9/06;B24B41/06;H01L21/301;H01L21/304;H01L21/677;H01L21/68;(IPC1-7):B23Q16/00
主分类号
B23Q3/18
代理机构
代理人
主权项
地址
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