发明名称 MICROSCOPE APPARATUS
摘要 A microscope apparatus includes a microscope body (10) having a mounting section (18). An observation unit (20) is removably fitted to the mounting section, and includes an objective lens unit (30) and a tip unit (32). The lens unit has an objective lens (36) opposed to an observation surface (28a) and forms an optical image of the surface viewable through the mircroscope body. The tip unit includes a support member (42) attached to the mounting section, and a glass plate (48) supported by the support member to be located between the objective lens and the observation surface. A fine conductive tip (38) is fixed to the glass plate and extends therefrom toward the observation surface, in the direction of an optical axis of the objective lens. A piezoelectric section (40) for shifting the glass plate is fixed to the support member.
申请公布号 EP0331148(A3) 申请公布日期 1991.06.12
申请号 EP19890103590 申请日期 1989.03.01
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HAYASHI, MASAKAZU;ISHIDA, FUMIHIKO;UTIDA, JUNZOU
分类号 G01N27/00;G01Q10/04;G01Q20/02;G01Q30/02;G01Q30/04;G01Q60/10;G01Q60/18;G01Q70/02;G02B21/00;(IPC1-7):G01N27/00 主分类号 G01N27/00
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