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发明名称
SEMICONDUCTOR PRODUCING APPARATUS
摘要
申请公布号
JPH01292820(A)
申请公布日期
1989.11.27
申请号
JP19880124216
申请日期
1988.05.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
TSUJITA KOICHIRO;UMESHITA NAOMI
分类号
G03F7/20;H01L21/027;H01L21/30
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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