Pressure transducer

摘要

The object of the invention consists of a miniature pressure transducer on the basis of a pressure-dependent resistor structure integrated in silicon, which is permanently protected against mechanical and chemical influences and has the possibility for zero-point and sensitivity monitoring in vivo, without significantly altering the transducer geometry in so doing. The pressure-sensitive semiconductor wafer and a corresponding counter body are embedded in an enveloping body of a highly elastic material, the highly elastic material adhering firmly to the counter body and to the edge regions of the semiconductor wafer, while it rests only loosely in the membrane region. The region of separation between membrane and highly elastic material can be loaded with pressure via a fine channel. Application in the intracorporal pressure measurement in physiological fluids of humans, especially in neurology (measurement of brain pressure) and cardiology (long-term measurements).