| 摘要 |
PURPOSE:To improve rectilinear propergation characteristic and responsiveness, by driving all oscillating units in the same phase at the same time. CONSTITUTION:A two-dimensional driving gear is composed of the oscillating units 4-51-53 of driving sources, these driving circuits 4-41-43, a direction controlling circuit 4-3 for controlling the output of said circuits, a drive controlling circuit 4-2, and an arithmetic controlling circuit 4-1 for arithmetic-controlling by input order from a setting means. At the time of driving, the driving force of a specified scale is generated at the respective oscillating units 4-51-53. Accordingly, the sum of respective vectors is set in the direction of driving a movable table as a moving unit. Besides, at the time of stopping, the scales of the vectors in the respective directions are made equal to each other. As a result, a force in the direction of canceling an inertial force is worked, and responsiveness at the time of stopping is improved. |
