发明名称 |
FRENO A TAMBURO PER VEICOLI |
摘要 |
The structured semiconductor body is based on an Si substrate having barrier regions which contain polycrystalline silicon and which are produced by an Si MBE process. The barrier regions are required to separate single-crystal Si semiconductor structures.
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申请公布号 |
IT1199791(B) |
申请公布日期 |
1988.12.30 |
申请号 |
IT19860022714 |
申请日期 |
1986.12.16 |
申请人 |
ROCKWELL GOLDE GMBH |
发明人 |
PETER BAUM;DAVID J. EDWARDS |
分类号 |
H01L21/20;H01L21/203;H01L21/763;(IPC1-7):F16D/ |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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