| 摘要 |
PURPOSE:To obtain a vapor flow control wall surface having excellent durability by winding the circumference of said wall with a heating coil and providing a high-frequency induction heater thereto. CONSTITUTION:A ferromagnetic material 3 is heated to evaporated in a vapor source 2. The evaporating material 3 is discriminated to two kinds; the particles colliding against the vapor flow control wall surface 11 installed to improve vapor deposition efficiency and the particles scattering from the upper aperture of this wall surface 11. The particles colliding against the wall surface disturb the vapor flow of the material 3 if the temp. of the wall surface 11 is not kept above the m.p. of the material 3. The melting and reevaporating of the material 3 adhered by vapor deposition on the wall surface 11 by the high-frequency induction heating power supply 12 and the heating coil 15 are also possible. Since the direct heating of the adhered ferromagnetic material by the high-frequency induction heating is possible, the use of ceramics such as alumina, magnesia and calcia as the material of the wall surface 11 is permitted and the durability of the wall surface 11 is improved.
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