High purity nitrogen producing method.

摘要

A high purity nitrogen producing method used in a pressure swing adsorption method including the steps of introducing a raw material gas containing N2 as a principal component and O2 into an adsorption column, adsorbing the N2 by an adsorbent, and reducing pressure in the adsorption column to desorb and recover the N2 having a high purity, characterized in that a synthetic zeolite is used as the adsorbent, and that an average contact time T (unit : sec) as expressed by T : L/V is not greater than 30 sec, where L is a filling length (unit : m) of the adsorbent, and V is an average superficial velocity (unit : m/sec) of a raw material gas in an adsorption column in an adsorption step. Also disclosed a high purity nitrogen producing device characterized in that a synthetic zeolite having an adjusted hole diameter of 7 - 10 A is filled in the adsorption column.