发明名称 APPARAT TIL AFSTIVNING AF KRYSTALSTAVEN VED DIGELFRI ZONESMELTNING
摘要 A process for the crucible-free zone pulling of a polycrystalline rod held vertically, together with a seed crystal fixed at its lower end, in which a melting zone is produced by means of an induction heating coil surrounding the rod, which zone, by means of relative movement of the coil and rod, traverses the entire length of the rod starting from the seed crystal, characterized in that after attaching the seed crystal to the rod, a support member is moved, below the induction heating coil, towards the rod, which support member rests gently against the rod and after being positioned, solidifies to form a firm support for the rod. A device for carrying out the process is also included.
申请公布号 DK152061(C) 申请公布日期 1988.07.11
申请号 DK19770004399 申请日期 1977.10.04
申请人 WACKER-CHEMITRONIC GESELLSCHAFT FUER ELEKTRONIK-GRUNDSTOFFE 发明人 HERZER, HEINZ;ZAUHAR, HELMUT;MUECKE, EBERHARD;KOEHL, FRANZ
分类号 C30B13/00;C30B13/20;C30B13/28;H01L21/208;(IPC1-7):C30B35/00 主分类号 C30B13/00
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