| 摘要 |
PURPOSE:To make control at an increased heating rate and stabilized heating temp. and to prevent contamination of a vapor deposition atmosphere and decrease in the vacuum degree thereof with a laser coating device, by projecting spectrally split laser light to a material to be deposited by evaporation and substrate for vapor deposition thereby heating said material and substrate. CONSTITUTION:Part of the laser light 2 from a CO2 laser oscillator 1 through a window 5 of a vacuum chamber 6 is spectrally split by a beam splitter 12 to the 2nd laser light 2A which is focused through a condenser lens 4 and the window 5 to the material 13 to be deposited by evaporation and is projected thereto to heat and evaporate said material. The material 13 is thus deposited by evaporation on the surface of the substrate 8. The material 13 and the substrate 8 are required to be previously heated in this case and, therefore, the 1st laser light 2B obtd. by spectrally splitting the laser light 2 by the splitter 12 is introduced through a reflecting mirror 14 and a window 15 into the vacuum vessel 1 and made into the 1st laser light 2C, 2D by changing the angle of a movable reflecting mirror 11. The beams of said light are projected to the material 13 and the substrate 8 to quickly heat the same. The beams are projected to an absorbent 16 at need to adequately control the heating temp. Generation of the contaminating gas from the heat source for heating, the contamination of the vapor deposition atmosphere and the decrease in the vacuum degree are obviated.
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