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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6341039(A)
申请公布日期
1988.02.22
申请号
JP19860185482
申请日期
1986.08.07
申请人
NEC KANSAI LTD
发明人
YAGI TAKASHI
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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