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发明名称
HIGH-TEMPERATURE FURNACE
摘要
申请公布号
JPS6337616(A)
申请公布日期
1988.02.18
申请号
JP19860181757
申请日期
1986.07.31
申请人
RICOH CO LTD
发明人
KAMEI YOJIRO
分类号
H01L21/31;H01L21/205;H01L21/22
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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