摘要 |
PURPOSE:To simplify design by inputting a deviation signal through special filters connected in series, which have a characteristic opposite to natural vibration characteristic, in which the frequency of a denominator is changed to be higher and that of a numerator is changed to be lower. CONSTITUTION:Special filters TF16, TF27 have a characteristic opposite to natural vibration characteristic corresponding to natural frequencies omega1, omega2. The frequency of a denominator is changed to be higher for a designated amount, and the frequency of a numerator is changed to be lower. A deviation between a detection signal and a set signal is input to a controller 1 by a position detector 5. Therefore, it is not necessary to provide plural natural frequency control loops in parallel connection, but it is possible to provide same in series connection which is easy to design and adjust. |