| 摘要 |
PURPOSE:To easily produce a member coated with high-hardness boron nitride at a low temp. by passing an active material in which a hydrogen element and nitrogen element exist and a material to be activated such as boron hydride through electric discharge then introducing the same into the surface of a substrate kept at an adequate temp. CONSTITUTION:The gaseous mixture formed by passing the active material which consists of nitrogen, hydrogen or nitrogen hydride, etc., and in which at least the hydrogen element and nitrogen element exist and the material to be activated which is <=1 kinds among boron hydride, borazine or borazine deriv. through the electric discharge or the gaseous mixture formed by passing the above-mentioned active material through the electric discharge, then mixing the same with the above-mentioned material to be activated is introduced into the surface of the substrate heated to 200-1,500 deg.C preferably under the internal pressure of 0.001-300Torr in a reaction vessel in which the electric discharge is generated by DC, high frequency or microwave. The coating layer of the boron nitride having the excellent density, high hardness and crystallinity is thus formed on the substrate surface and the member coated with the high-hardness boron nitride is obtd.
|
