| 摘要 |
PURPOSE:To prevent air bubbles from being mixed to a photopolymer layer by reducing an air pressure so as to descend a center pole after an outer peripheral seal is set and the center pole is elevated by the air pressure, filling in a radiant-ray curing resin to the inner peripheral part and adhering a substrate to the said resin and applying radiant-ray radiation. CONSTITUTION:A stamper 13 is fixed to a base by an adhesive agent and the center pole 15 elevated and descended for alignment is provided to the center of the stamper 13. After a photopolymer 12 is applied onto the stamper 13, the substrate 11 is set to a constant position, but since the center pole 15 is elevated, the substrate 11 and the photopolymer 12 are not in contact with each other. Then the substrate 11 is brought into contact with the photopolymer 12 and when the center pole 15 is elevated, the substrate 11 is deformed as an umbrella, then the photopolymer 12 is spread to the outer peripheral part and air bubbles are discharged. Then air 17 is supplied from the lower part of the center pole 15 to pressurize the pole and fine air bubbles in the innermost peripheral part of the photopolymer 12 are eliminated completely. |
