| 摘要 |
PURPOSE:To obtain a gas sensor remarkably low in dispersion of gas detection characteristics, by mixing a special component for controlling growth of particles to the fundamental composition consisting of indium oxide, tin oxide, and palladium oxide. CONSTITUTION:This detection ensor has a fundamental composition consisting of 3 components of indium oxide, tin oxide, and palladium oxide each having a feature in order to enhance and balance sensitivity to various gases. The proportion of the 3 components of the fundamental composition needs to be selected as follows: 25-50wt% indium oxide, 75-50wt% tin oxide, and 0.06-5% palladium oxide. When indium oxide exceeds 50wt%, the resistance of the sensor becomes too small to cause a problem in forming the circuit of an alarm. When tin oxide exceeds 75wt%, the content of hydrogent concn. becomes low, and the sensor is lowered in ensitivity at high concn. Almost uniform particle size is maintained by adding at least one of silica and alumina to the 3 components of the fundamental composition and suppressing growth of the particles becoming a factor of causing dispersion of the sensor characteristics. |
