Method of manufacturing a semiconductor device comprising dielectric isolation regions.

摘要

The invention provides a method for manufacturing a semiconductor device, having the steps of: forming a first mask pattern on a semiconductor layer (101), through an Si02 film; forming a thin layer on at least side surfaces of the first mask pattern; selectively forming a second mask pattern on an Si02 film portion located between the thin layer portions formed on the side surface of the first mask pattern; selectively etching the thin layer portions formed on the at least side surfaces of the first mask pattern, and the Si02 film portions under the thin layer portions formed on the side surfaces of the first mask pattern, using the first and second mask patterns; selectively etching an exposed portion of the semiconductor layer (101) to form a trench (108); and forming an element isolation region (111) or burying an insulating material (110) in the trench (108).