| 摘要 |
PURPOSE:To obtain the ohmic electrode, resistance thereof hardly varies and which is easily joined, by coating GaAs with an AuGe group metal, thermally treating GaAs and laminating a metal having excellent adhesive property, such as Ni, Cr, etc. and Au and Ag. CONSTITUTION:GaAs is coated with AuGe/Ni, AuGe/Pt, AuGe/Ni/Au or the like, and thermally treated, one part is alloyed with GaAs, the surface is coated with the metal having excellent adhesive property, such as Ti, Cr, etc. in 1,000Angstrom thickness or thinner, and Au or Ag is evaporated continuously. According to this constitution, the surface is fine, the bonding strength of connection is also large, and ohmic resistance hardly changes even through treatment at a high temperature. |
