METHOD OF PRODUCING IRON OXIDE PHOTO MASKS AND IRON OXIDE MASKS OBTAINED IN ACCORDANCE WITH THIS METHOD

摘要

Method of producing photomasks of X-ray amorphous iron oxide (Fe203) by spraying a transparent substrate at a temperature between 180 and 250.degree.C with a solution of an hydrolysable iron salt in a polar organic solution or, in accordance with a variant of this method, at a temperature between 180 and 750.degree.C with a solution of a hydrolysable iron salt which also contains a salt of a metal having a greater ion diameter. If temperatures above approximately 230.degree.C are used, the solvent may in the latter case also consist of water only.