PROCEDE POUR DEPOSER PAR PULVERISATION UNE COUCHE ADDITIONNELLE SUR OU PLUSIEURS COUCHES SITUEES A LA SURFACE D'UN SUBSTRAT,申请号BE19780185084-传众专利搜索

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发明名称	PROCEDE POUR DEPOSER PAR PULVERISATION UNE COUCHE ADDITIONNELLE SUR OU PLUSIEURS COUCHES SITUEES A LA SURFACE D'UN SUBSTRAT
摘要
申请公布号	BE863867(A1)	申请公布日期	1978.05.29
申请号	BE19780185084	申请日期	1978.02.10
申请人	SIEMENS A.G.	发明人
分类号	H01L21/203;C23C14/34;H01L21/033;H01L21/311;H01L21/316;H01L21/3213;(IPC1-7):B05D/	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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