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发明名称
ION BEAM MACHINE TOOL
摘要
申请公布号
JPS5288900(A)
申请公布日期
1977.07.25
申请号
JP19760005242
申请日期
1976.01.19
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KONISHI BUNYA;KUSAO KENJI;YOSHIOKA YOSHIAKI
分类号
B23K15/00;H01J37/301;H01J37/305
主分类号
B23K15/00
代理机构
代理人
主权项
地址
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