发明名称 |
Energy efficient process for continuous production of thin semiconductor films on metallic substrates |
摘要 |
An energy efficient process is disclosed for the continuous production of semiconductor matrices formed from depositing doped silicon or germanium films on metallic sheet substrates. The energy released from such deposition can then be used to regenerate the anode material used in the deposition.
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申请公布号 |
US4227291(A) |
申请公布日期 |
1980.10.14 |
申请号 |
US19780918034 |
申请日期 |
1978.06.22 |
申请人 |
J. C. SCHUMACHER CO. |
发明人 |
SCHUMACHER, JOHN C. |
分类号 |
C30B7/12;H01L21/208;H01L31/18;(IPC1-7):B01J17/00 |
主分类号 |
C30B7/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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