| 摘要 |
PURPOSE:To prevent a resist from cracking and obtain a thermal head having high reliability by providing a partial glaze layer in the vicinity of the peripheral part of a substrate. CONSTITUTION:A substrate 101 is provided with shallow grooves 102 for splitting. Next, a partial glaze layer 103 is provided by screen printing. In this case, a partial glaze layer 103' is provided also at a peripheral part. A tantalum nitride layer is then deposited by sputtering. A heat generating resistor layer 104 is patterned by the application of a resist, exposure, etching and releasing of a resist pattern. After depositing a nichrome layer of 500Angstrom thick and a gold layer by sputtering, an electrode conductor layer 105 is similarly patterned. Then, a silicon oxide layer and a tantalum pentoxide layer are provided as a protective layer 106 by sputtering. A thermal head thus produced has an extremely high reliability. |
