| 摘要 |
PROBLEM TO BE SOLVED: To provide electronic equipment capable of preventing generation of a crack on a protection film.SOLUTION: Electronic equipment in an embodiment includes: a MEMS element 20 provided on a ground region 10; and a protection film 30 including a first layer 31, a second layer 32 provided on the first layer, and a third layer 33 provided on the second layer, covering the MEMS element, and forming a cavity 40 on the inside. The outer periphery of the second layer is positioned further inside than the outer periphery of the cavity from the viewpoint in a direction perpendicular to the surface of the ground region.SELECTED DRAWING: Figure 1 |
