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发明名称
VAPOR PHASE EPITAXY APPARATUS FOR SEMICONDUCTOR
摘要
申请公布号
JPS551175(A)
申请公布日期
1980.01.07
申请号
JP19790035623
申请日期
1979.03.28
申请人
HITACHI LTD
发明人
SUZUKI TAKAYA
分类号
C30B25/16;C30B25/14;H01L21/205;H01L21/31
主分类号
C30B25/16
代理机构
代理人
主权项
地址
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