| 摘要 |
PURPOSE:To increase the maximum discharge power by laser oscillation of small size but high output by a method wherein conductive auxiliary discharge electrode plates forming a pair above and below and rectifying the flows of gas are provided in parallel in the neighborhood of a cathode located to the upper side of the gas circulation. CONSTITUTION:In the title device of gas circulation type, a gap 3 is formed between substrates 1, 2 forming a pair above and below and provided with the discharge section composed of cathodes 7, 8 and anodes 9, 10; then, in the neighborhood of the cathodes 7, 8 located to the upper side of the gas circulation, conductive auxiliary discharge electrode plates 14, 15 forming a pair above and below and rectifying the flow 4 of gas are provided in parallel. This construction makes the cathode temperature decrease with falls in temperature of the cathodes 7, 8 of the main discharge section on the supply of charged particles to this main discharge section. Besides, the in-anode field of glow discharge decreases, and so the oscillation efficiency of laser beams improves thereby. |
