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发明名称
PICKUPPTUBE TARGET
摘要
申请公布号
JPS54137916(A)
申请公布日期
1979.10.26
申请号
JP19780045295
申请日期
1978.04.19
申请人
HITACHI ELECTRONICS
发明人
RIYUURAKU SUSUMU;KATSUHARA YUKINORI
分类号
H01J29/45;H01J29/36;H01L31/08;H01L31/10
主分类号
H01J29/45
代理机构
代理人
主权项
地址
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