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发明名称
MANUFACTURE OF JOSEPHSON INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS5967675(A)
申请公布日期
1984.04.17
申请号
JP19820177604
申请日期
1982.10.12
申请人
KOGYO GIJUTSUIN (JAPAN)
发明人
KOSUGI MASATO;SHIBAYAMA HIKOSUKE
分类号
H01L39/24
主分类号
H01L39/24
代理机构
代理人
主权项
地址
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