发明名称 |
RANGE-BASED REAL-TIME SCANNING ELECTRON MICROSCOPE NON-VISUAL BINNER |
摘要 |
A technique to identify non-visual defects, such as SEM non-visual defects (SNVs), includes generating an image of a layer of a wafer, evaluating at least one attribute of the image using a classifier, and identifying the non-visual defects on the layer of the wafer. A controller can be configured to identify the non-visual defects using the classifier. This controller can communicate with a defect review tool, such as a scanning electron microscope (SEM). |
申请公布号 |
WO2017024065(A1) |
申请公布日期 |
2017.02.09 |
申请号 |
WO2016US45410 |
申请日期 |
2016.08.03 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
ROY, Hemanta;JAIN, Arpit;YATI, Arpit;MOREAU, Olivier;LOBO, Arun |
分类号 |
G01N21/95;G01N21/88;G01Q30/02 |
主分类号 |
G01N21/95 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|