| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus in which the utilization efficiency of a process liquid can be enhanced, by using a process liquid having a different degree of degradation depending on the cleanliness of a substrate to be processed.SOLUTION: When processing a plurality of substrates W having different cleanliness, a control unit 53 processes a substrate of high cleanliness in a processing unit 15. When a life count unit 57 detects the fact that the degree of degradation of processing liquid in the processing unit 15 has reached a predetermined value, the processing liquid in the processing unit 15 is fed from a liquid feed unit 27 to a processing unit 16. In the processing unit 16, a substrate W of low cleanliness is processed with that processing liquid. Since the processing liquid is not discarded immediately even if it is degraded, but used for processing a substrate W of low cleanliness that can be processed with that processing liquid, utilization efficiency of processing liquid can be enhanced. |
