发明名称 半導体装置
摘要 Technique capable of achieving reliability improvement of a semiconductor device even if temperature rising of an operation guarantee temperature of the semiconductor device is performed is provided. Gap portions are provided among a plurality of pads, and a glass coat composed of, for example, a silicon oxide film or a silicon nitride film is embedded in the gap portions. The glass coat is provided in order to secure electrical insulation among the pads, and coats outer edge portions of the pads. Trenches are formed so as to be adjacent to regions, which are coated with the glass coat, of the outer edge portions of the pads.
申请公布号 JP5926988(B2) 申请公布日期 2016.05.25
申请号 JP20120051546 申请日期 2012.03.08
申请人 ルネサスエレクトロニクス株式会社 发明人 秦 志康;齊藤 隆幸;堀部 裕史
分类号 H01L21/60;H01L23/29;H01L23/31 主分类号 H01L21/60
代理机构 代理人
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