| 摘要 |
PROBLEM TO BE SOLVED: To effectively release the heat of terminal pins electrically connected to a control device that controls a pump body.SOLUTION: A vacuum pump comprises: a pump body; a control device that controls the pump body; a printed board on which a wiring pattern connected to the control device is formed; and a terminal member including a sealing component that seals an opening part of the pump body, and terminal pins passed through the sealing component and connected to the wiring pattern. The periphery of the opening part of the pump body is connected to a surface in the printed board opposed to the pump body so that heat can be conducted.SELECTED DRAWING: Figure 3 |
