METHOD FOR REFURBISHING SPENT RUTHENIUM OR RUTHENIUM ALLOY-BASED SPUTTERING TARGET, AND REFURBISHED RUTHENIUM OR RUTHENIUM ALLOY-BASED SPUTTERING TARGET WITH UNIFORM GRAINS PREPARED THEREBY

摘要

The present invention provides a method for refurbishing a spent ruthenium (Ru) or Ru alloy-based sputtering target and an Ru or Ru alloy-based sputtering target refurbished by the method, the method comprising the steps of: (a) washing or cutting a spent Ru or Ru alloy-based sputtering target; (b) inserting the washed or cut spent target into a mold; (c) forming a laminate by charging a raw material powder having the same ingredient as the spent target into the mold in which the spent target has been inserted, and by flattening same; (d) forming a green compact by applying pressure to the laminate; and (e) sintering the green compact.