SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus and a substrate processing method which enable improvement of a washing degree of a table to which a substrate is attached during polishing and a backing material.SOLUTION: A buff processing module 300A is an apparatus for performing buff processing to a processing object and includes: a buff table 400 including a support surface 402 for supporting the processing object; and a washing mechanism for washing the support surface 402 of the buff table 400 through physical contact.SELECTED DRAWING: Figure 2