| 发明名称 |
MEMS SWITCHES WITH REDUCED SWITCHING VOLTAGE AND METHODS OF MANUFACTURE |
| 摘要 |
MEMS switches and methods of manufacturing MEMS switches is provided. The MEMS switch having at least two cantilevered electrodes having ends which overlap and which are structured and operable to contact one another upon an application of a voltage by at least one fixed electrode. |
| 申请公布号 |
US2016035510(A1) |
申请公布日期 |
2016.02.04 |
| 申请号 |
US201514883745 |
申请日期 |
2015.10.15 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LUCE Stephen E.;STAMPER Anthony K. |
| 分类号 |
H01H11/00;H01H59/00;B81C1/00 |
主分类号 |
H01H11/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of fabricating a switch comprising:
forming a first fixed electrode and a second fixed electrode; forming a first cantilevered electrode aligned vertically over the first fixed electrode; forming a second cantilevered electrode aligned vertically over the second fixed electrode, and which has an end that overlaps and is operable to directly contact an end of the first cantilevered electrode upon an application of a voltage to at least one of the first fixed electrode and the second fixed electrode; and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode. |
| 地址 |
Armonk NY US |
