TRAY FOR A WAFER WITH TAPE FRAME

摘要

A tray for storing a wafer with a tape frame in a storage container includes a ring-shaped frame, a dicing tape and a semiconductor wafer. The dicing tape is stuck on the rear surface of the ring-shaped frame, and the semiconductor wafer is supported on the dicing tape. The tray has a substantially circular shape and is positioned on the upper side and the lower side of the wafer with tape frame. The front surface of the tray has a flat portion for mounting the wafer, and at least a portion of the outer peripheral portion of the front surface of the tray includes a convex portion. A projecting portion is formed on the rear surface so that the projection portion is positioned outside the outer periphery of the semiconductor wafer of the wafer with the tape frame when the tray is positioned on the wafer with tape frame.

主权项

1. A tray for use in storing a wafer with tape frame in a storage container, the wafer with tape frame comprises a ring-shaped frame, a dicing tape and a semiconductor wafer, the dicing tape is stuck on the rear surface of the ring-shaped frame, the semiconductor wafer is supported on the dicing tape, wherein,
the tray has a substantially circular shape and is positioned on the upper side and the lower side of the wafer with tape frame; the front surface of the tray has a substantially flat portion for mounting the wafer with tape frame, at least a portion of the outer peripheral portion of the front surface of the tray includes a convex portion; and a projecting portion is formed on the rear surface of the tray so that the projection portion is positioned outside the outer periphery of the semiconductor wafer of the wafer with tape frame when the tray is positioned on the wafer with tape frame.