Interferometer

摘要

The interferometer has a beam splitter (2) which divides light from a light source (1) into measuring and reference beams propagating in the measurement and reference arms. A measuring reflector (3) causes an offset between the incident and the back reflected measuring beams. A detector array (7) generates distance-dependent interference signal with respect to position of measuring reflector based on superimposed and combined measurement and reference beam bundles (M,R). The measurement reflector is equipped with a transmission grating and a reflector element.